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English
March 14-16,2018
Shanghai New International Expo Centre

Xuena Zhang

Xuena Zhang
Yield Technology Group, AKT Display Business Group, Applied Materials

Biography

Dr. Xuena Zhang holds PhD in Physics from Max Planck Institute in Germany and was a postdoctoral scholar at Stanford university. She worked at multiple famous semiconductor companies in R&D for process/device integration and metrology/inspection. She is currently leading display inspection products R&D and application at Applied Materials, aiming to bring semiconductor method to display, help display companies rapidly ramp up their yield and avoid yield excursion.

Abstract

Inline inspection-based analytical techniques adapted from high-volume semiconductor manufacturing can help manufacturers of metal oxide (IGZO) , low-temperature polysilicon (LTPS) LCD and flexible OLED displays. During production ramp-up, the use of this new technology developed at Applied Materials electron beam review (EBR)  will enable display manufacturers to achieve optimum yields faster than traditional methods, allowing them to capture millions of dollars in revenue and avoid costly yield excursions.

Combining state-of-the-art scanning electron microscopy (SEM) with large-scale display vacuum platforms, EBR is a new approach that can shave several months from the average IGZO and LTPS display fab ramp time of 15 months.

Applied Materials has developed inline EBR technology as a better, faster way to discover and address the root causes of killer defects in mobile display production, which is characterized by an increasing number of process steps that can generate more—and smaller—killer defects.

Applied Materials’ new inline EBR technology integrates state of the art SEM technology with the Applied AKT Electron Beam Array test platform, the fastest, highest-resolution and least-damaging e-beam technology commercially available. Applied Materials has developed the inline EBR SEM technology with features such as a precision stage used to locate defects based on coordinates supplied by an Automated Optical Inspection (AOI) tools.

With some 20 years of innovation and experience with inline SEM-based inspection techniques in the semiconductor industry, the company is now extending those capabilities to the manufacturing of mobile LCD and OLED displays for better and faster root-cause analysis of defects.

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