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March 20-22, 2019
Shanghai New International Expo Centre

陈勇辉

陈勇辉
Vice President, SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP)CO., LTD.(SMEE)

Biography

陈勇辉博士目前为上海微电子装备(集团)股份有限公司副总经理,主要负责公司市场战略规划及光刻机产品营销管理。

陈勇辉博士2003年毕业于华中科技大学,致力于光刻机技术研发和产业化工作十余年,先后被授予“上海市青年科技启明星”、“上海市优秀技术带头人”称号,2014年被授予“全国机械工业劳动模范”,发表学术论文20余篇,拥有60余项国际、国内专利。

Abstract

The FPD industry has now formed the game situation in the four major regions of Korea, Japan, China Mainland and Taiwan. In recent years, the panel factories have sprung up in China Mainland, where the investment has increased significantly and the technology level is approaching overseas. However, most of the key equipment are still supplied by Japan, South Korea and the United States. In the future, it will inevitably restrict the development and surpass of the mainland panel factories, who will be in urgent need of the support of domestic equipment. Shanghai Micro Electronics Equipment (Group) Co., Ltd. (SMEE) has successfully developed and promoted IC advanced packaging projection lithography equipment and LED projection lithography equipment based on the various precision manufacturing technologies accumulated by IC front end. The technology is advanced, and the market share has been more than 90% in China. Based on rich experience of other industry, in the display industry SMEE has developed the G4.5 lithography equipment with small mask and large exposure field by scanning method, meeting to the demand of high PPI panel manufacturing, and innovatively launched the G6 small mask projection lithography equipment, which can significantly reduce the use of cost, especially the mask cost. After accumulating a large number of key technologies in display industry, SMEE has quickly launched other high precision equipment, such as IPS photo alignment equipment, Total Pitch measurement equipment and OLED laser encapsulation equipment, so as to meet the increasing demand of precision equipment in display industry.